Calculation of surface composition

Element data and intensity values are entered into separate windows. Results can be presented in several forms (Atomic %;, Atomic ratio, Oxide molar %, Oxide molar ratio, Mass %, Mass ratio, Oxide mass % or Oxide mass ratio). Up to 40 experiments (e.g., ion etch series) can be calculated simultaneously.

When one of the oxide type normalisation is selected, the oxygen balance, the ratio of the measured and calculated (required by the elements at the given stoichiometry and oxidation states) oxygen concentration is also displayed.