XPS MultiQuant

Latest version:
7.83.998

Independently selectable features of XPS MultiQuant

Feature Options Remarks
Quantification models » Homogeneous 1
Oxide-Layer
Layers-on-Plane 2, 3
Layers-on-Sphere 2, 4
Layers-on-Cylinder 2
Layers-on-Polyhedron 2
Layers-on-Nanotube 2, 5
Islands-on-Plane 3
Islands-on-Sphere 4
Islands-on-Cylinder
Islands-on-Polyhedron
Islands-on-Nanotube

1 Multilines variants.

2 Multillayers variant.

3 Angle dependent calculation.

4 Single row variant.

5 Modified tube layer variant.

Multiline approach 1 None
Average
Ebel
Main

1 For homogeneous model.

Excitation sources Mg Kα
Al Kα
Other 1

1 Excitation energy is supplied by the user.

Cross-section or
sensitivity factor sets
None
Scofield
Evans
Wagner
Nefedov
Explicit 1

1 Sensitivity factors or cross-sections are supplied by the user.

IMFP correction None
Explicit 1, 2
Exponential 1
Seah-Dench 1, 2
Jablonski 1
Tanuma-Powell-Penn 2
Gries 1, 2
Cumpson-Seah 2, 3

1 For homogeneous model.

2 For structured models to calculate explicit IMFP values.

3 Attenuation length.

Angular correction None
Reilman
Reilman-Ebel 1

1 Correction for elastic scattering.

Contamination correction 1 None
Explicit
Evans
Mohai

1 For structured models contamination correction can be implemented by specifying a definite contaminant layer.

Analyser transmission
correction
None
FRR, CRR
FAT, CAE
Exponential
File:

Polynomial (0 - 6) 1
Exponential 1
Rational (NPL)
Combined (Unifit)
Tabulated 2

1 Separate coefficient sets for different kinetic energy regions.

2 Linear interpolation.

Normalisation of composition results Atomic percent
Atomic ratio
Oxide molar percent 1
Oxide molar ratio 1
Mass percent
Mass ratio
Oxide mass percent 1
Oxide mass ratio 1

1 Oxygen balance is calculated.