Latest version:
7.83.956
Feature | Options | Remarks |
---|---|---|
Quantification models » |
Homogeneous ^{1} Oxide-Layer Layers-on-Plane ^{2, 3} Layers-on-Sphere ^{2, 4} Layers-on-Cylinder ^{2} Layers-on-Polyhedron ^{2} Layers-on-Nanotube ^{2, 5} Islands-on-Plane ^{3} Islands-on-Sphere ^{4} Islands-on-Cylinder Islands-on-Polyhedron Islands-on-Nanotube |
^{1} Multilines variants. ^{2} Multillayers variant. ^{3} Angle dependent calculation. ^{4} Single row variant. ^{5} Modified tube layer variant. |
Multiline approach ^{1} |
None Average Ebel Main |
^{1} For homogeneous model. |
Excitation sources |
Mg Kα Al Kα Other ^{1} |
^{1} Excitation energy is supplied by the user. |
Cross-section or sensitivity factor sets |
None Scofield Evans Wagner Nefedov Explicit ^{1} |
^{1} Sensitivity factors or cross-sections are supplied by the user. |
IMFP correction |
None Explicit ^{1, 2} Exponential ^{1} Seah-Dench ^{1, 2} Jablonski ^{1} Tanuma-Powell-Penn ^{2} Gries ^{1, 2} Cumpson-Seah ^{2, 3} |
^{1} For homogeneous model. ^{2} For structured models to calculate explicit IMFP values. ^{3} Attenuation length. |
Angular correction |
None Reilman Reilman-Ebel ^{1} |
^{1} Correction for elastic scattering. |
Contamination correction ^{1} |
None Explicit Evans Mohai |
^{1} For structured models contamination correction can be implemented by specifying a definite contaminant layer. |
Analyser transmission correction |
None FRR, CRR FAT, CAE Exponential File:
Polynomial (0 - 6) ^{1} |
^{1} Separate coefficient sets for different kinetic energy regions. ^{2} Linear interpolation. |
Normalisation of composition results |
Atomic percent Atomic ratio Oxide molar percent ^{1} Oxide molar ratio ^{1} Mass percent Mass ratio Oxide mass percent ^{1} Oxide mass ratio ^{1} |
^{1} Oxygen balance is calculated. |