Independently selectable features of XPS MultiQuant

Feature	Options	Remarks
Quantification models »	Homogeneous ¹ Oxide-Layer Layers-on-Plane ^{2, 3} Layers-on-Sphere ^{2, 4} Layers-on-Cylinder ² Layers-on-Polyhedron ² Layers-on-Nanotube ^{2, 5} Islands-on-Plane ³ Islands-on-Sphere ⁴ Islands-on-Cylinder Islands-on-Polyhedron Islands-on-Nanotube	¹ Multilines variants. ² Multillayers variant. ³ Angle dependent calculation. ⁴ Single row variant. ⁵ Modified tube layer variant.
Multiline approach ¹	None Average Ebel Main	¹ For homogeneous model.
Excitation sources	Mg Kα Al Kα Other ¹	¹ Excitation energy is supplied by the user.
Cross-section or sensitivity factor sets	None Scofield Evans Wagner Nefedov Explicit ¹	¹ Sensitivity factors or cross-sections are supplied by the user.
IMFP correction	None Explicit ^{1, 2} Exponential ¹ Seah-Dench ^{1, 2} Jablonski ¹ Tanuma-Powell-Penn ² Gries ^{1, 2} Cumpson-Seah ^{2, 3}	¹ For homogeneous model. ² For structured models to calculate explicit IMFP values. ³ Attenuation length.
Angular correction	None Reilman Reilman-Ebel ¹	¹ Correction for elastic scattering.
Contamination correction ¹	None Explicit Evans Mohai	¹ For structured models contamination correction can be implemented by specifying a definite contaminant layer.
Analyser transmission correction	None FRR, CRR FAT, CAE Exponential File: Polynomial (0 - 6) ¹ Exponential ¹ Rational (NPL) Combined (Unifit) Tabulated ²	¹ Separate coefficient sets for different kinetic energy regions. ² Linear interpolation.
Normalisation of composition results	Atomic percent Atomic ratio Oxide molar percent ¹ Oxide molar ratio ¹ Mass percent Mass ratio Oxide mass percent ¹ Oxide mass ratio ¹	¹ Oxygen balance is calculated.