Quantification Report                              
      /export/home/kratos/data/Y09/Si-scrx.dset              Fri Feb 19 13:42:32 2010

                                                                                      
      State #0 : Etch Time     0.00 seconds                                           
                                                                                      
      Peak              Position   FWHM    Raw Area   RSF    Atomic   Atomic   Mass   
                        BE (eV)    (eV)     (CPS)             Mass    Conc %  Conc %  
                                                                                      
      O 1s               532.300   1.925     2666.1  0.736   15.999   32.79   32.21   
      C 1s               284.400   1.684     1711.8  0.318   12.011   48.73   35.93   
      Si 2p              102.800   1.720      757.2  0.371   28.086   18.48   31.86   
                                                                                      
      State #1 : Etch Time   120.00 seconds                                           
                                                                                      
      Peak              Position   FWHM    Raw Area   RSF    Atomic   Atomic   Mass   
                        BE (eV)    (eV)     (CPS)             Mass    Conc %  Conc %  
                                                                                      
      O 1s               531.700   2.148     9665.6  0.736   15.999   47.22   36.26   
      C 1s               283.700   1.306      847.1  0.318   12.011    9.58    5.52   
      Si 2p               98.600   1.555     4456.9  0.371   28.086   43.20   58.22   
                                                                                      
      State #2 : Etch Time   420.00 seconds                                           
                                                                                      
      Peak              Position   FWHM    Raw Area   RSF    Atomic   Atomic   Mass   
                        BE (eV)    (eV)     (CPS)             Mass    Conc %  Conc %  
                                                                                      
      O 1s               531.100   1.622      660.5  0.736   15.999    5.71    3.73   
      C 1s               284.100   2.011      892.0  0.318   12.011   17.85    8.74   
      Si 2p               98.500   1.569     4456.6  0.371   28.086   76.44   87.53